Effect of Heat Treatment on Magnetic and Electrical Properties of AlN Films with Co Particles
- 저자
- 오*섭
- 게재저널
- http://www.kim.or.kr/
- 키워드
- thin films, sputtering, magnetic properties, resistivity, saturation magnetization
- 개요
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Recent high technology developments of electronic devices have led to a demand for miniaturization of magnetic devices [4] operating at frequencies higher than50 MHz. For such devices, it is required that magnetic materials have a sufficiently large electric resistivity ρ and are in the form of thin films, in order to suppress eddy current losses. In order to solve those problems, high resistive metal films possessing a very fine two-phase hetero-amorphous structure have been studied, and amagnetic granular system, where magnetic particles are embedded in an insulator matrix, has also been studied [5,6]. AlN-Co films showed high resistivity and sufficient saturation magnetization, and the coercivity of the films was 22~94 Oe at a magnetic field of 1 kOe[7,8].
Moreover, it was found that multilayer films show better soft magnetic properties than monolayer films [9]. An ideal high-density recording magnetic material must have high permeability,high electrical resistivity, large saturation magnetization coupled with low energy loss and also a high corrosion esistance.
This is why we used AlN as a highly resistive and high corrosion resistance insulator matrix and Co as magnetic particles embedded or dispersed in that matrix. And Al-Co interlayers in the multilayers were used to control grain growth which will result in smaller coercivity.
In this paper, we investigate the modification of specific microstructures in AlN films containing magnetic metal and alloy particles, which can show soft magnetic properties and performance suitable for high density recording head material, by optimizing heat treatments.
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